Advanced Fabrication Technology Research Center for Integrated Circuits is an integral part of the public technical support and knowledge innovation for School of Integrated Circuits at Peking University, including Fabrication Laboratory and Measurement Laboratory. The Fabrication Laboratory consists of two independent micro nano fabrication platforms located at the Yanyuan campus (4-inches CMOS/MEMS hybrid line) and the New Yanyuan campus (8-inches CMOS line) respectively.
The lab lines feature over 4000 square meters of clean room space, more than 100 installed tools for wafer processing and packaging, and an established suite of micro/nano process flows. The lab can provide leading-edge fabrication capabilities in CMOS logic and MEMS devices with various materials. The Measurement Laboratory includes three testing platforms at Yanyuan Campus, New Yanyuan Campus, and BDA, Beijing, with a total area of over 2500 square meters. The lab covers a testing and characterization capabilities at material level, device level, circuit level, and system level. The research center serves all the research and teaching units throughout the Peking University, and also provides various technical services to the public ecosystem.
